2Port-4 Port LPM / Soft and High Speed Wafer Handling with AC Servo System Control.
FOOTPRINT Optimization / FFU Differential-Pressure Interaction Mode / Enable smooth top down air flow with enclosure structure
OPTION : Pre-ALIGNER, SIDE STORAGE。
主要特征：
■ Carrier : 300mm FOUP (SEMI E47.1-1101)
■ Cleanliness : ISO Class1
■ Electric Supply : 208VAC±10%, 3Phase
■ Acoustic Noise : < 70dB
■ Communication : Ethernet
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